TY  - RPRT
TI  - On the applicability of Sato's equation to capacitative radio frequency sheaths
AU  - J. Balakrishnan
AU  - G. R. Nagabhushana
PY  - 2003
DO  - 10.1088/0022-3727/33/24/101
UR  - https://arxiv.org/abs/physics/0310038
ID  - physics/0310038
ER  -