TY - RPRT TI - Influence of ambipolar potential on the properties of inductively coupled discharges at the bounce resonance condition AU - Oleg V. Polomarov AU - Constantine E. Theodosiou AU - Igor D. Kaganovich PY - 2004 UR - https://arxiv.org/abs/physics/0404060 ID - physics/0404060 ER -