@misc{indiciae75cbc61c6b6d, title = {Two-dimensional PIC-MCC simulations of capacitively coupled radio-frequency discharge in methane}, author = {A L Alexandrov and I V Schweigert}, year = {2004}, doi = {10.1088/0963-0252/14/2/001}, url = {https://arxiv.org/abs/physics/0406047}, note = {Source identifier: physics/0406047} }