TY  - RPRT
TI  - Two-dimensional PIC-MCC simulations of capacitively coupled radio-frequency discharge in methane
AU  - A L Alexandrov
AU  - I V Schweigert
PY  - 2004
DO  - 10.1088/0963-0252/14/2/001
UR  - https://arxiv.org/abs/physics/0406047
ID  - physics/0406047
ER  -