@misc{indiciae9bac0005d27a,
  title = {Fabrication of micro-mirrors with pyramidal shape using anisotropic etching of silicon},
  author = {Z. Moktadir and C. Gollasch and E. Koukharenko and M. Kraft and G. Vijaya Prakash and J. J. Baumberg and M. Trupke and S. Eriksson and E. A. Hinds},
  year = {2004},
  url = {https://arxiv.org/abs/physics/0409021},
  note = {Source identifier: physics/0409021}
}