@misc{indiciae926b589fc260,
  title = {3D etching profile evolution simulation using sparse field level set method},
  author = {Branislav Radenovic and S. J. Kim and J. K. Lee},
  year = {2004},
  url = {https://arxiv.org/abs/physics/0409130},
  note = {Source identifier: physics/0409130}
}