@misc{indiciae13df1a022d5e,
  title = {Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications},
  author = {Ameya Bapat and Curtis Anderson and Christopher R. Perrey and C. Barry Carter and Stephen A. Campbell and Uwe Kortshagen},
  year = {2004},
  doi = {10.1088/0741-3335/46/12b/009},
  url = {https://arxiv.org/abs/physics/0410038},
  note = {Source identifier: physics/0410038}
}