TY  - RPRT
TI  - Plasma synthesis of single crystal silicon nanoparticles for novel electronic device applications
AU  - Ameya Bapat
AU  - Curtis Anderson
AU  - Christopher R. Perrey
AU  - C. Barry Carter
AU  - Stephen A. Campbell
AU  - Uwe Kortshagen
PY  - 2004
DO  - 10.1088/0741-3335/46/12b/009
UR  - https://arxiv.org/abs/physics/0410038
ID  - physics/0410038
ER  -