@misc{indiciaef047bf323fbd,
  title = {Production of a large diameter ECR plasma for plasma processing},
  author = {Mayuko Koga and Yasuhiro Hishikawa and Hayato Tsuchiya and Yoshinobu Kawai},
  year = {2004},
  url = {https://arxiv.org/abs/physics/0410135},
  note = {Source identifier: physics/0410135}
}