TY  - RPRT
TI  - Production of a large diameter ECR plasma for plasma processing
AU  - Mayuko Koga
AU  - Yasuhiro Hishikawa
AU  - Hayato Tsuchiya
AU  - Yoshinobu Kawai
PY  - 2004
UR  - https://arxiv.org/abs/physics/0410135
ID  - physics/0410135
ER  -