@misc{indiciaee6357877ac21,
  title = {Technology for Production of Ultra-Thin Crystal Silicon Membranes},
  author = {V. B. Vyssotsky and E. V. Lobko and A. S. Lobko},
  year = {2005},
  url = {https://arxiv.org/abs/physics/0508079},
  note = {Source identifier: physics/0508079}
}