TY  - RPRT
TI  - Technology for Production of Ultra-Thin Crystal Silicon Membranes
AU  - V. B. Vyssotsky
AU  - E. V. Lobko
AU  - A. S. Lobko
PY  - 2005
UR  - https://arxiv.org/abs/physics/0508079
ID  - physics/0508079
ER  -