@misc{indiciaec36c67db7392, title = {Ellipsometry noise spectrum, suspension transfer function measurement and closed-loop control of the suspension system in the Q \& A experiment}, author = {Sheng-Jui Chen and Hsien-Hao Mei and Wei-Tou Ni}, year = {2005}, doi = {10.1088/1742-6596/32/1/036}, url = {https://arxiv.org/abs/physics/0508176}, note = {Source identifier: physics/0508176} }