TY  - RPRT
TI  - Ellipsometry noise spectrum, suspension transfer function measurement and closed-loop control of the suspension system in the Q & A experiment
AU  - Sheng-Jui Chen
AU  - Hsien-Hao Mei
AU  - Wei-Tou Ni
PY  - 2005
DO  - 10.1088/1742-6596/32/1/036
UR  - https://arxiv.org/abs/physics/0508176
ID  - physics/0508176
ER  -