@misc{indiciaefe9be45f6438, title = {Titanium plasma source for capillary discharge extreme ultraviolet lasers}, author = {Moshe Shuker and Amit Ben-kish and Amnon Fisher and Amiram Ron}, year = {2005}, doi = {10.1063/1.2172298}, url = {https://arxiv.org/abs/physics/0512067}, note = {Source identifier: physics/0512067} }