@misc{indiciae9d039dc5b2db,
  title = {Overlay Alignment Using Two Photonic Crystals},
  author = {Can Peng and Keith Morton and Zhaoning Yu and Stephen Y. Chou},
  year = {2005},
  url = {https://arxiv.org/abs/physics/0512073},
  note = {Source identifier: physics/0512073}
}