@misc{indiciae509c0d233dd8,
  title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation},
  author = {S. Burger and R. Köhle and L. Zschiedrich and W. Gao and F. Schmidt and R. März and C. Nölscher},
  year = {2006},
  doi = {10.1117/12.631696},
  url = {https://arxiv.org/abs/physics/0601143},
  note = {Source identifier: physics/0601143}
}