@misc{indiciaec8e93c138991,
  title = {Computation of Electrostatic Properties of 3D MEMS Structures},
  author = {N. Majumdar and S. Mukhopadhyay},
  year = {2006},
  url = {https://arxiv.org/abs/physics/0604035},
  note = {Source identifier: physics/0604035}
}