@misc{indiciae1490165cbc04,
  title = {Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography},
  author = {X. Liu and K. -H. Brenner and M. Wilzbach and M. Schwarz and T. Fernholz and J. Schmiedmayer},
  year = {2006},
  doi = {10.1364/ao.44.006857},
  url = {https://arxiv.org/abs/physics/0608216},
  note = {Source identifier: physics/0608216}
}