TY  - RPRT
TI  - Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography
AU  - X. Liu
AU  - K. -H. Brenner
AU  - M. Wilzbach
AU  - M. Schwarz
AU  - T. Fernholz
AU  - J. Schmiedmayer
PY  - 2006
DO  - 10.1364/ao.44.006857
UR  - https://arxiv.org/abs/physics/0608216
ID  - physics/0608216
ER  -