@misc{indiciae789d1c40dd62,
  title = {Nomarski imaging interferometry to measure the displacement field of MEMS},
  author = {Fabien Amiot and Jean Paul Roger},
  year = {2006},
  doi = {10.1364/ao.45.007800},
  url = {https://arxiv.org/abs/physics/0610183},
  note = {Source identifier: physics/0610183}
}