TY  - RPRT
TI  - Nomarski imaging interferometry to measure the displacement field of MEMS
AU  - Fabien Amiot
AU  - Jean Paul Roger
PY  - 2006
DO  - 10.1364/ao.45.007800
UR  - https://arxiv.org/abs/physics/0610183
ID  - physics/0610183
ER  -