@misc{indiciae3b19555b669c,
  title = {Rigorous Simulation of 3D Masks},
  author = {S. Burger and R. Köhle and L. Zschiedrich and H. Nguyen and F. Schmidt and R. März and C. Nölscher},
  year = {2006},
  doi = {10.1117/12.687816},
  url = {https://arxiv.org/abs/physics/0610218},
  note = {Source identifier: physics/0610218}
}