@misc{indiciae0d53018dbf96,
  title = {Rigorous FEM-Simulation of EUV-Masks: Influence of Shape and Material Parameters},
  author = {J. Pomplun and S. Burger and F. Schmidt and L. Zschiedrich and F. Scholze and C. Laubis and U. Dersch},
  year = {2006},
  doi = {10.1117/12.686828},
  url = {https://arxiv.org/abs/physics/0610236},
  note = {Source identifier: physics/0610236}
}