@misc{indiciae5f5a9fa53d8c, title = {A Study of Monolithic CMOS Pixel Sensors Back-thinning and their Application for a Pixel Beam Telescope}, author = {Marco Battaglia and Devis Contarato and Piero Giubilato and Leo Greiner and Lindsay Glesener and Benjamin Hooberman}, year = {2006}, doi = {10.1016/j.nima.2007.05.276}, url = {https://arxiv.org/abs/physics/0611081}, note = {Source identifier: physics/0611081} }