@misc{indiciae9aaf4210921e,
  title = {Use of the neBEM solver to Compute the 3D Electrostatic Properties of Comb Drives},
  author = {S. Mukhopadhyay and N. Majumdar},
  year = {2006},
  url = {https://arxiv.org/abs/physics/0612155},
  note = {Source identifier: physics/0612155}
}