TY  - RPRT
TI  - Use of the neBEM solver to Compute the 3D Electrostatic Properties of Comb Drives
AU  - S. Mukhopadhyay
AU  - N. Majumdar
PY  - 2006
UR  - https://arxiv.org/abs/physics/0612155
ID  - physics/0612155
ER  -