@misc{indiciaedc5d8da13df5,
  title = {Factors Affecting the Precision of Electrostatic Computation of 3D MEMS Structures},
  author = {N. Majumdar and S. Mukhopadhyay},
  year = {2006},
  url = {https://arxiv.org/abs/physics/0612164},
  note = {Source identifier: physics/0612164}
}