TY  - RPRT
TI  - Factors Affecting the Precision of Electrostatic Computation of 3D MEMS Structures
AU  - N. Majumdar
AU  - S. Mukhopadhyay
PY  - 2006
UR  - https://arxiv.org/abs/physics/0612164
ID  - physics/0612164
ER  -