@misc{indiciaef76151c1cc1b,
  title = {Fast and Precise 3D Computation of Capacitance of Parallel Narrow Beam MEMS Structures},
  author = {N. Majumdar and S. Mukhopadhyay},
  year = {2007},
  url = {https://arxiv.org/abs/physics/0703060},
  note = {Source identifier: physics/0703060}
}