TY  - RPRT
TI  - Fast and Precise 3D Computation of Capacitance of Parallel Narrow Beam MEMS Structures
AU  - N. Majumdar
AU  - S. Mukhopadhyay
PY  - 2007
UR  - https://arxiv.org/abs/physics/0703060
ID  - physics/0703060
ER  -