@misc{indiciae370351a9d836, title = {An Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles due to Ion Implantation}, author = {Keith M. Beardmore and Niels Gronbech-Jensen}, year = {1999}, doi = {10.1103/physreve.57.7278}, url = {https://arxiv.org/abs/physics/9901054}, note = {Source identifier: physics/9901054} }