TY  - RPRT
TI  - An Efficient Molecular Dynamics Scheme for the Calculation of Dopant Profiles due to Ion Implantation
AU  - Keith M. Beardmore
AU  - Niels Gronbech-Jensen
PY  - 1999
DO  - 10.1103/physreve.57.7278
UR  - https://arxiv.org/abs/physics/9901054
ID  - physics/9901054
ER  -