TY - RPRT TI - A phenomenological electronic stopping power model for molecular dynamics and Monte Carlo simulation of ion implantation into silicon AU - David Cai AU - Niels Gronbech-Jensen AU - Charles M. Snell AU - Keith M. Beardmore PY - 1999 DO - 10.1103/physrevb.54.17147 UR - https://arxiv.org/abs/physics/9901056 ID - physics/9901056 ER -