@misc{indiciaeb583bddfef20,
  title = {Simulation of phosphorus implantation into silicon with a single-parameter electronic stopping power model},
  author = {D. Cai and C. M. Snell and K. M. Beardmore and N. Gronbech-Jensen},
  year = {1999},
  doi = {10.1142/s0129183198000352},
  url = {https://arxiv.org/abs/physics/9901057},
  note = {Source identifier: physics/9901057}
}