TY  - RPRT
TI  - Simulation of phosphorus implantation into silicon with a single-parameter electronic stopping power model
AU  - D. Cai
AU  - C. M. Snell
AU  - K. M. Beardmore
AU  - N. Gronbech-Jensen
PY  - 1999
DO  - 10.1142/s0129183198000352
UR  - https://arxiv.org/abs/physics/9901057
ID  - physics/9901057
ER  -