@misc{indiciae30026074324d,
  title = {A versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays},
  author = {Thomas Naiser and Timo Mai and Wolfgang Michel and Albrecht Ott},
  year = {2006},
  doi = {10.1063/1.2213152},
  url = {https://arxiv.org/abs/q-bio/0608038},
  note = {Source identifier: q-bio/0608038}
}