TY  - RPRT
TI  - A versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays
AU  - Thomas Naiser
AU  - Timo Mai
AU  - Wolfgang Michel
AU  - Albrecht Ott
PY  - 2006
DO  - 10.1063/1.2213152
UR  - https://arxiv.org/abs/q-bio/0608038
ID  - q-bio/0608038
ER  -