@misc{indiciae6cf03e633b96, title = {Quantum interferometric optical lithography:towards arbitrary two-dimensional patterns}, author = {Pieter Kok and Agedi N. Boto and Daniel S. Abrams and Colin P. Williams and Samuel L. Braunstein and Jonathan P. Dowling}, year = {2001}, doi = {10.1103/physreva.63.063407}, url = {https://arxiv.org/abs/quant-ph/0011088}, note = {Source identifier: quant-ph/0011088} }