TY  - RPRT
TI  - Quantum interferometric optical lithography:towards arbitrary two-dimensional patterns
AU  - Pieter Kok
AU  - Agedi N. Boto
AU  - Daniel S. Abrams
AU  - Colin P. Williams
AU  - Samuel L. Braunstein
AU  - Jonathan P. Dowling
PY  - 2001
DO  - 10.1103/physreva.63.063407
UR  - https://arxiv.org/abs/quant-ph/0011088
ID  - quant-ph/0011088
ER  -