@misc{indiciae581a65a5e38a,
  title = {Sub-wavelength lithography over extended areas},
  author = {Gunnar Bjork and Luis L. Sanchez Soto and Jonas Soderholm},
  year = {2001},
  doi = {10.1103/physreva.64.013811},
  url = {https://arxiv.org/abs/quant-ph/0101122},
  note = {Source identifier: quant-ph/0101122}
}