TY  - RPRT
TI  - Sub-wavelength lithography over extended areas
AU  - Gunnar Bjork
AU  - Luis L. Sanchez Soto
AU  - Jonas Soderholm
PY  - 2001
DO  - 10.1103/physreva.64.013811
UR  - https://arxiv.org/abs/quant-ph/0101122
ID  - quant-ph/0101122
ER  -