@misc{indiciaeb3a479810277,
  title = {Nonmaximally-entangled-state quantum photolithography},
  author = {Yan-Hui Wang and Le-Man Kuang},
  year = {2004},
  doi = {10.1088/1464-4266/5/5/005},
  url = {https://arxiv.org/abs/quant-ph/0402059},
  note = {Source identifier: quant-ph/0402059}
}