@misc{indiciaeccb5e891a20c,
  title = {Two-dimensional Nanolithography Using Atom Interferometry},
  author = {A. Gangat and P. Pradhan and G. Pati and M. S. Shahriar},
  year = {2004},
  doi = {10.1103/physreva.71.043606},
  url = {https://arxiv.org/abs/quant-ph/0404158},
  note = {Source identifier: quant-ph/0404158}
}