@misc{indiciae3855b0bc3dc9, title = {Atom Nano-lithography with Multi-layer Light Masks: Particle Optics Analysis}, author = {R. Arun and I. Sh. Averbukh and T. Pfau}, year = {2005}, doi = {10.1103/physreva.72.023417}, url = {https://arxiv.org/abs/quant-ph/0503181}, note = {Source identifier: quant-ph/0503181} }