TY  - RPRT
TI  - Atom Nano-lithography with Multi-layer Light Masks: Particle Optics Analysis
AU  - R. Arun
AU  - I. Sh. Averbukh
AU  - T. Pfau
PY  - 2005
DO  - 10.1103/physreva.72.023417
UR  - https://arxiv.org/abs/quant-ph/0503181
ID  - quant-ph/0503181
ER  -