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At least 145 records · Page 8Linked to original sources

arXiv2008

A Fully Parameterized Fem Model for Electromagnetic Optimization of an RF Mems Wafer Level Package

In this work, we present a fully parameterized capped transmission line model for electromagnetic optimization of a wafer level package (WLP) for RF MEMS applications using the Ansoft HFSS-TM electromagnetic simulator. All the degrees of freedom (DoF's) in the package fabrication can be modified within the model in order to optimize for losses and mismatch (capacitive and inductive couplings) introduced by the cap affecting the MEMS RF behaviour. Ansoft HFSS-TM was also validated for the simulation of capped RF MEMS devices by comparison against experimental data. A test run of capped 50 transmission lines and shorts was fabricated and tested.

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arXiv2008

Development of a Nanostructual Microwave Probe Based on GaAs

With the development of nanotechnology, the measurement of electrical properties in local area of materials and devices has become a great need. Although a lot kind of scanning probe microscope have been developed for satisfying the requirement of nanotechnology, a microscope technique which can determine electrical properties in local area of materials and devices is not yet developed. Recently, microwave microscope has been an interest to many researchers, due to its potential in the evaluation of electrical properties of materials and devices. The advance of microwave is that the response of materials is directly relative to the electromagnetic properties of materials. However, because of the problem of the structure of probes, nanometer-scale resolution has not been successful. To achieve the goal, a new structure microwave probe is required. In this paper, we report a nanostructural microwave probe. To restrain the attenuation of microwave in the probe, GaAs was used as the substrate of the probe. To obtain the desired structure, wet etching was used to fabricate the probe. Different with the dry etching, a side-etching will occur under the etching mask. Utilizing this property, a micro tip can be fabricated by etching a wafer, of which a small mask was introduced on the surface in advance.

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arXiv2008

Characterisation of an Electrostatic Vibration Harvester

Harvesting energy from ambient vibration is proposed as an alternative to storage based power supplies for autonomous systems. The system presented converts the mechanical energy of a vibration into electrical energy by means of a variable capacitor, which is polarized by an electret. A lumped element model is used to study the generator and design a prototype. The device has been micromachined in silicon, based on a two-wafer process. The prototype was successfully tested, both using an external polarization source and an electret.

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arXiv2008

Surface Generation Analysis in Micro End-Milling Considering the Influences of Grain

Micro end-milling method is a universal micro manufacturing method, which can be used to fabricating complex 3D structures and parts with many materials. But compared with their micrometer order size, their surface roughness quality is not satisfied. In this paper, the different metal phase grains influences are researched, and the micro end-milling process is described while the material is anisotropic. In this paper, the physical characteristics of different grains, especially friction coefficient and elastic module, are very critical to determine the chip formation process and surface generation. The chip is often discontinues because of the grain boundary effect. Through the micro end-milling experiment, the bottom surface results correlate very well with the theory analysis.

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arXiv2008

An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters

An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip surface. The adapter is sealed to the chip surface by means of a thermal procedure. By this approach it is possible to selectively convey the fluid flow to reduced chip areas, avoiding contact with the pads. Fabrication and testing of a very compact flow sensor is described.

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arXiv2008

A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism

In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-Plane Overlap Plate (IPOP) configuration [1]. Measurements have shown that with a theoretically lossless electronics and a starting voltage of 5 V, power density of 58 $μ$W/cm3 is achievable at the resonance frequency of 290 Hz. It can be further improved by reducing the parasitic capacitance, which can be achieved by silicon etching, but a considerable mass is lost. In [2], it is shown that 19% of mass reduction improves power density from 12.95 $μ$W/cm3 to 59 $μ$W/cm3. Hence an enhancement in fabrication process is proposed, which is termed as Backside DRIE. It helps in increasing power density without loosing an important quantity of mass. Simulations have shown that 2.5% of mass removal improves power density up to 76.71 $μ$W/cm3. Initial simulation results and problems of associated electronics are also discussed.

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arXiv2008

Formation of Embedded Microstructures by Thermal Activated Solvent Bonding

We present a thermal activated solvent bonding technique for the formation of embedded microstrucutres in polymer. It is based on the temperature dependent solubility of polymer in a liquid that is not a solvent at room temperature. With thermal activation, the liquid is transformed into a solvent of the polymer, creating a bonding capability through segmental or chain interdiffusion at the bonding interface. The technique has advantages over the more commonly used thermal bonding due to its much lower operation temperature (30 degrees C lower than the material's Tg), lower load, as well as shorter time. Lap shear test indicated bonding shear strength of up to 2.9 MPa. Leak test based on the bubble emission technique showed that the bonded microfluidic device can withstand at least 6 bars (87 psi) of internal pressure (gauge) in the microchannel. This technique can be applied to other systems of polymer and solvent.

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arXiv2008

Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors

For modern Gas sensors, high sensitivity and low power are expected. This paper discusses design, simulation and fabrication of new Micromachined Thermal Converters (MTCs) based on GaAs developed for Gas sensors. Metal oxide gas sensors generally work in high temperature mode that is required for chemical reactions to be performed between molecules of the specified gas and the surface of sensing material. There is a low power consumption required to obtain the operation temperatures in the range of 200 to 500 oC. High thermal isolation of these devices solves consumption problem and can be made by designing of free standing micromechanical hot plates. Mechanical stability and a fast thermal response are especially significant parameters that can not be neglected. These characteristics can be achieved with new concept of GaAs thermal converter.

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arXiv2008

Set-up and characterization of a humidity sensor realized in LTCC-technology

A new type of integrated temperature and humidity sensor applying LTCC-technology has been developed and characterized. In this approach, sensing elements are implemented using heated metal resistors (Pt-elements), where one is exposed to the humid environment that causes the sensor element to cool down with increased humidity, while the other one is sealed from the environment. Sensor design is based on FEA (Finite Element Analyses) where the critical design parameters have been analyzed with regard to the performance characteristic of the device. The set-up of sensor element will be shown and the functional capability will be demonstrated by experimental results.

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arXiv2008

Micromachined Polycrystalline Sige-Based Thermopiles for Micropower Generation on Human Body

This paper presents a polycrystalline silicon germanium (poly-SiGe) thermopile specially designed for thermoelectric generators used on human body. Both the design of the single thermocouple and the arrangement of the thermocouple array have been described. A rim structure has been introduced in order to increase the temperature difference across the thermocouple junctions. The modeling of the thermocouple and the thermopile has been performed analytically and numerically. An output power of about 1 $μ$W at an output voltage of more than 1 V is expected from the current design of thermopiles in a watch-size generator. The key material properties of the poly-SiGe have been measured. The thermopile has been fabricated and tested. Experimental results clearly demonstrate the advantage of the rim structure in increasing output voltage. In presence of forced convection, the output voltage of a non-released thermopile can increase from about 53 mV/K/cm2 to about 130 mV/K/cm2 after the rim structure is formed. A larger output voltage from the thermopile is expected upon process completion.

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arXiv2008

Silicon microneedles array with biodegradable tips for transdermal drug delivery

This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main problems related to silicon microneedles : broking of the top part of the needles inside the skin, a simple solution can be fabrication of microneedles array with biodegradable tips. The silicon microneedles array was fabricated by using reactive ion etching while the biodegradable tips were performed using and anodization process that generates selectively porous silicon only on the top part of the skin. The paper presents also the results of in vitro release of calcein using microneedles array with biodegradable tips

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arXiv2008

2-D Analysis of Enhancement of Analytes Adsorption Due to Flow Stirring by Electrothermal Force in The Microcantilever Sensor

Ac electrokinetic flows are commonly used for manipulating micron-scale particles in a biosensor system. At the solid-liquid state there are two kinds of processes in the reaction between analytes and ligands: the mass transport process and the chemical reaction process. The mass transport process is related to convection and diffusion. Total or partial limit of mass transport would retard the diffusion from the bulk fluid to the interface of reaction. This effect decreases the possibility of adsorption of analyte and ligand because the chemical reaction is faster than the diffusion. In order to solve this problem, we apply an ac electric field to induce a vortex field by the electrothermal effect, which helps in increasing the rate of diffusion. By using the finite element analysis software, COMSOL Multiphysics, we optimized several parameters of the microelectrode structures and the position of the reacting surface, i.e. the microcantilever, by a simplified 2-D model and a 3-D model. It is successful in accelerating the reacting rate of the molecule which is limited by mass transport. The factor of the efficiency is about 1.429 when the operating voltage is 15 Vrms peak-to-peak. In addition, the surface concentration of the complex on the microcantilever has been simulated.

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arXiv2008

Development and Application of a Diaphragm Micro-Pump with Piezoelectric Device

In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate the liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 5mm x 8mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow which may change the chamber volume by changing the curvature of a diaphragm. Several experimental set-ups for performance test in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system is designed and implemented. The performance of one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70-180 Hz.

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arXiv2008

Simulation of valveless micropump and mode analysis

In this work, a 3-D simulation is performed to study for the solid-fluid coupling effect driven by piezoelectric materials and utilizes asymmetric obstacles to control the flow direction. The result of simulation is also verified. For a micropump, it is crucial to find the optimal working frequency which produce maximum net flow rate. The PZT plate vibrates under the first mode, which is symmetric. Adjusting the working frequency, the maximum flow rate can be obtained. For the micrpump we studied, the optimal working frequency is 3.2K Hz. At higher working frequency, say 20K Hz, the fluid-solid membrane may come out a intermediate mode, which is different from the first mode and the second mode. It is observed that the center of the mode drifts. Meanwhile, the result shows that a phase shift lagging when the excitation force exists in the vibration response. Finally, at even higher working frequency, say 30K Hz, a second vibration mode is observed.

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arXiv2008

Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor

This study has successfully demonstrated a novel self-heating formaldehyde gas sensor based on a thin film of NiO sensing layer. A new fabrication process has been developed in which the Pt micro heater and electrodes are deposited directly on the substrate and the NiO thin film is deposited above on the micro heater to serve as sensing layer. Pt electrodes are formed below the sensing layer to measure the electrical conductivity changes caused by formaldehyde oxidation at the oxide surface. Furthermore, the upper sensing layer and NiO/Al2O3 co-sputtering significantly increases the sensitivity of the gas sensor, improves its detection limit capability. The microfabricated formaldehyde gas sensor presented in this study is suitable not only for industrial process monitoring, but also for the detection of formaldehyde concentrations in buildings in order to safeguard human health.

cs.OH↗

arXiv2008

Mems Q-Factor Enhancement Using Parametric Amplification: Theoretical Study and Design of a Parametric Device

Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.

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arXiv2008

Biodegradable Polylactic Acid (PLA) Microstructures for Scaffold Applications

In this research, we present a simple and cost effective soft lithographic process to fabricate PLA scaffolds for tissue engineering. In which, the negative photoresist JSR THB-120N was spun on a glass subtract followed by conventional UV lithographic processes to fabricate the master to cast the PDMS elastomeric mold. A thin poly(vinyl alcohol) (PVA) layer was used as a mode release such that the PLA scaffold can be easily peeled off. The PLA precursor solution was then cast onto the PDMS mold to form the PLA microstructures. After evaporating the solvent, the PLA microstructures can be easily peeled off from the PDMS mold. Experimental results show that the desired microvessels scaffold can be successfully transferred to the biodegradable polymer PLA.

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arXiv2008

Solving functional reliability issue for an optical electrostatic switch

In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electro-statically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.

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