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arXiv · 0809.2222

Coherent Diffraction Imaging of Single 95nm Nanowires

V. Favre-Nicolin·J. Eymery·R. K. Koster·P. Gentile
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Abstract

Photonic or electronic confinement effects in nanostructures become significant when one of their dimension is in the 5-300 nm range. Improving their development requires the ability to study their structure - shape, strain field, interdiffusion maps - using novel techniques. We have used coherent diffraction imaging to record the 3-dimensionnal scattered intensity of single silicon nanowires with a lateral size smaller than 100 nm. We show that this intensity can be used to recover the hexagonal shape of the nanowire with a 28nm resolution. The article also discusses limits of the method in terms of radiation damage.

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V. Favre-Nicolin, J. Eymery, R. K. Koster, P. Gentile. 2008-12-18. Coherent Diffraction Imaging of Single 95nm Nanowires. https://doi.org/10.1103/physrevb.79.195401

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