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arXiv · 1001.5048

Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror

Celia Blain·Rodolphe Conan·Colin Bradley·Olivier Guyon·Curtis Vogel
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Abstract

In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuator's stroke-voltage relationship and the effect of the non- additivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.

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Celia Blain, Rodolphe Conan, Colin Bradley, Olivier Guyon, Curtis Vogel. 2010-01-27. Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror. https://doi.org/10.1051/ao4elt/201006009

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