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arXiv · 1105.5710

Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures

Sarah Goler·Vincenzo Piazza·Stefano Roddaro·Vittorio Pellegrini·Fabio Beltram·Pasqualantonio Pingue
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Abstract

We report on suspended single-layer graphene deposition by a transfer-printing approach based on polydimethylsiloxane stamps. The transfer printing method allows the exfoliation of graphite flakes from a bulk graphite sample and their residue-free deposition on a silicon dioxide substrate. This deposition system creates a blistered graphene surface due to strain induced by the transfer process itself. Single-layer-graphene deposition and its "blistering" on the substrate are demonstrated by a combination of Raman spectroscopy, scanning electron microscopy and atomic-force microscopy measurements. Finally, we demonstrate that blister-like suspended graphene are self-supporting single-layer structures and can be flattened by employing a spatially-resolved direct-lithography technique based on electron-beam induced etching.

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Sarah Goler, Vincenzo Piazza, Stefano Roddaro, Vittorio Pellegrini, Fabio Beltram, Pasqualantonio Pingue. 2011-05-28. Self-assembly and electron-beam-induced direct etching of suspended graphene nanostructures. https://doi.org/10.1063/1.3633260

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